Authors:
SU CC
HOU HQ
LEE GH
DAI ZG
LUO WA
VERNON MF
BENT BE
Citation: Cc. Su et al., IDENTIFICATION OF THE VOLATILE REACTION-PRODUCTS OF THE CL2+GAAS ETCHING REACTION, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 11(4), 1993, pp. 1222-1242
Authors:
GREGUS JA
VERNON MF
GOTTSCHO RA
SCHELLER GR
HOBSON WS
OPILA RL
YOON E
Citation: Ja. Gregus et al., LOW-TEMPERATURE PLASMA-ETCHING OF GAAS, ALGAAS, AND ALAS, Plasma chemistry and plasma processing, 13(3), 1993, pp. 521-537