Authors:
SHAMRAI KP
VIRKO VF
BLOM HO
PAVLENKO VP
TARANOV VB
JONSSON LB
HEDLUND C
BERG S
Citation: Kp. Shamrai et al., DISCHARGE DISRUPTIONS IN A HELICON PLASMA SOURCE, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 15(6), 1997, pp. 2864-2874