Authors: VOLPYAS VA HOLLMANN EK PLOTKIN DA GOLDRIN VI

Citation: Va. Volpyas et al., ION-PLASMA SPUTTERING OF MULTICOMPONENT MATERIALS, Vacuum, 51(2), 1998, pp. 227-230

Authors: PETROV PK VOLPYAS VA HOLLMANN EK TANAKA T KAWABATA K

Citation: Pk. Petrov et al., MONTE-CARLO SIMULATION OF ARGON ATOMS TRANSPORT DURING DEPOSITION OF W THIN-FILMS BY RF-DC COUPLED MAGNETRON SPUTTERING, Vacuum, 48(7-9), 1997, pp. 669-670