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Citation: Sr. Vosen et al., SIMULATION OF CHEMICAL DOWNSTREAM ETCH SYSTEMS - CORRELATION OF THE EFFECTS OF OPERATING-CONDITIONS ON WAFER ETCH RATE AND UNIFORMITY, Journal of the Electrochemical Society, 144(4), 1997, pp. 1514-1521

Authors: MEEKS E LARSON RS VOSEN SR SHON JW

Citation: E. Meeks et al., MODELING CHEMICAL DOWNSTREAM ETCH SYSTEMS FOR NF3 O-2 MIXTURES/, Journal of the Electrochemical Society, 144(1), 1997, pp. 357-366

Authors: VOSEN SR CARLING RW RYCHNOVSKY RE GRIFFITHS SK RENZI RF

Citation: Sr. Vosen et al., THE EFFECT OF ELASTOMERIC LINERS ON HIGH-PRESSURE LIQUID PROPELLANT COMBUSTION OSCILLATIONS, Propellants, explosives, pyrotechnics, 20(6), 1995, pp. 311-321