Authors:
Vanasupa, L
Pinck, D
Joo, YC
Nogami, T
Pramanick, S
Lopatin, S
Yang, K
Citation: L. Vanasupa et al., The impact of linewidth and line density on the texture of electroplated Cu in Damascene-fabricated lines, EL SOLID ST, 2(6), 1999, pp. 275-277
Authors:
Vanasupa, L
Joo, YC
Besser, PR
Pramanick, S
Citation: L. Vanasupa et al., Texture analysis of damascene-fabricated Cu lines by x-ray diffraction andelectron backscatter diffraction and its impact on electromigration performance, J APPL PHYS, 85(5), 1999, pp. 2583-2590