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ENG
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Results: 1
Interface structures in GaAs wafer bonding: Application to compliant substrates
Authors:
Vanfleet, RR Shverdin, M Silcox, J Zhu, ZH Lo, YH
Citation:
Rr. Vanfleet et al., Interface structures in GaAs wafer bonding: Application to compliant substrates, APPL PHYS L, 76(19), 2000, pp. 2674-2676
Risultati:
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