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Results: 1
Nucleation of chemical vapor deposited silicon nitride on silicon dioxide
Authors:
Copel, M Varekamp, PR Kisker, DW McFeely, FR Litz, KE Holl, MMB
Citation:
M. Copel et al., Nucleation of chemical vapor deposited silicon nitride on silicon dioxide, APPL PHYS L, 74(13), 1999, pp. 1830-1832
Risultati:
1-1
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