Authors: Vehkamaki, M Hanninen, T Ritala, M Leskela, M Sajavaara, T Rauhala, E Keinonen, J

Citation: M. Vehkamaki et al., Atomic layer deposition of SrTiO3 thin films from a novel strontium precursor-strontium-bis(tri-isopropylcyclopentadienyl), CHEM VAPOR, 7(2), 2001, pp. 75-80

Authors: Vehkamaki, M Hatanpaa, T Hanninen, T Ritala, M Leskela, M

Citation: M. Vehkamaki et al., Growth of SrTiO3 and BaTiO3 thin films by atomic layer deposition, EL SOLID ST, 2(10), 1999, pp. 504-506