Authors: Peterson, CA Vermeire, B Sarid, D Parks, HG

Citation: Ca. Peterson et al., Reduction of surface roughening due to copper contamination prior to ultra-thin gate oxidation, APPL SURF S, 181(1-2), 2001, pp. 28-34

Authors: Peterson, CA Workman, RK Sarid, D Vermeire, B Parks, HG Adderton, D Maivald, P

Citation: Ca. Peterson et al., Effects of moisture on Fowler-Nordheim characterization of thin silicon-oxide films, J VAC SCI A, 17(5), 1999, pp. 2753-2758