Authors: Summerfelt, SR Moise, TS Xing, G Colombo, L Sakoda, T Gilbert, SR Loke, ALS Ma, S Wills, LA Kavari, R Hsu, T Amano, J Johnson, ST Vestcyk, DJ Russell, MW Bilodeau, SM van Buskirk, P

Citation: Sr. Summerfelt et al., Demonstration of scaled (>= 0.12 mu m(2)) Pb(Zr,Ti)O-3 capacitors on W plugs with Al interconnect, APPL PHYS L, 79(24), 2001, pp. 4004-4006