Authors:
Moller, H
Eickhoff, M
Vogelmeier, L
Rapp, M
Krotz, G
Papaioannou, V
Stoemenos, J
Citation: H. Moller et al., Influence of the silicon overlayer thickness of SOI unibond substrates on beta-SIC heteroepitaxy, MAT SCI E B, 61-2, 1999, pp. 567-570