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Deposition of cBN films by ion sputtering of SiB6 and AlB12 boron-base materials
Authors:
Novikov, NV Voronkin, MA Zaika, NI
Citation:
Nv. Novikov et al., Deposition of cBN films by ion sputtering of SiB6 and AlB12 boron-base materials, DIAM RELAT, 7(11-12), 1998, pp. 1693-1697
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