Authors: WELLS GM ANDERSON PD LEONARD QJ CERRINA F WALDO WG YAMAZAKI K

Citation: Gm. Wells et al., EVALUATION OF A SOLID-STATE DETECTOR FOR X-RAY-LITHOGRAPHY DOSIMETRY, JPN J A P 1, 33(12B), 1994, pp. 6905-6907

Authors: WELLS GM BRODSKY EL CERRINA F WALDO WG

Citation: Gm. Wells et al., EVALUATION OF BERYLLIUM FOILS FOR X-RAY-LITHOGRAPHY BEAMLINES, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 11(6), 1993, pp. 3008-3011