Authors: KING DO WARD MCL BRUNSON KM HAMILTON DJ

Citation: Do. King et al., POLYSILICON PROCESS-DEVELOPMENT FOR FULLY INTEGRATED SURFACE-MICROMACHINED ACCELEROMETER WITH CMOS ELECTRONICS, Sensors and actuators. A, Physical, 68(1-3), 1998, pp. 238-243

Authors: CANHAM LT REEVES CL KING DO BRANFIELD PJ CRABB JG WARD MCL

Citation: Lt. Canham et al., BIOACTIVE POLYCRYSTALLINE SILICON, Advanced materials, 8(10), 1996, pp. 850

Authors: WARD MCL KING DO HODGE AM

Citation: Mcl. Ward et al., PERFORMANCE LIMITATIONS OF SURFACE-MACHINED ACCELEROMETERS FABRICATEDIN POLYSILICON GATE MATERIAL, Sensors and actuators. A, Physical, 46(1-3), 1995, pp. 205-209