Authors: HAN LQ WANG WD MCCORD MA BERGLUND CN PEASE RFW WEAVER LS

Citation: Lq. Han et al., PRACTICAL APPROACH TO SEPARATING THE PATTERN GENERATOR-INDUCED MASK CD ERRORS FROM THE BLANK PROCESS-INDUCE MASK CD ERRORS USING CONVENTIONAL MARKET MEASUREMENTS/, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 15(6), 1997, pp. 2243-2248