Authors: PFEIFFER HC DAVIS DE ENICHEN WA GORDON MS GROVES TR HARTLEY JG QUICKLE RJ ROCKROHR JD STICKEL W WEBER EV

Citation: Hc. Pfeiffer et al., EL-4, A NEW-GENERATION ELECTRON-BEAM LITHOGRAPHY SYSTEM, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 11(6), 1993, pp. 2332-2341