Citation: J. Werno et al., REDUCTION OF HEAT-LOSS OF SILICON MEMBRANES BY THE USE OF TRENCH-ETCHING TECHNIQUES, Sensors and actuators. A, Physical, 42(1-3), 1994, pp. 578-581
Authors:
SCHUTZE A
WEBER U
ZACHEJA J
KOHL D
MOKWA W
ROSPERT M
WERNO J
Citation: A. Schutze et al., INPLANE INTERDIGITATED (IPID) ELECTRODES FOR THIN-FILM APPLICATIONS, Fresenius' journal of analytical chemistry, 346(1-3), 1993, pp. 380-382
Authors:
SCHUTZE A
WEBER U
ZACHEJA J
KOHL D
MOKWA W
ROSPERT M
WERNO J
Citation: A. Schutze et al., A NEW MICROSTRUCTURED SILICON SUBSTRATE FOR ULTRATHIN GAS-SENSITIVE FILMS, Sensors and actuators. A, Physical, 37-8, 1993, pp. 751-755