Authors:
FELD SA
LOEHR JP
SHERRIFF RE
WIEMERI J
KASPI R
Citation: Sa. Feld et al., IN-SITU OPTICAL MONITORING OF ALAS WET OXIDATION USING A NOVEL LOW-TEMPERATURE LOW-PRESSURE STEAM FURNACE DESIGN, IEEE photonics technology letters, 10(2), 1998, pp. 197-199