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SURFACE-FEATURES OF CONDUCTORS ERODED BY SPUTTERING IN A MAGNETRON GLOW-DISCHARGE PLASMA
Authors:
DEHGHAN K SHI Z WOODRUM TH BREWER S SACKS R
Citation:
K. Dehghan et al., SURFACE-FEATURES OF CONDUCTORS ERODED BY SPUTTERING IN A MAGNETRON GLOW-DISCHARGE PLASMA, Applied spectroscopy, 48(5), 1994, pp. 553-560
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