Authors: Gotkis, Y Alamgir, S Yang, L Dai, F Mitchell, F Nguyen, J Shumway, L Walesa, LR Yang, J Nunan, P Holland, K

Citation: Y. Gotkis et al., Selectivity switch concept in Cu chemical mechanical planarization and itsimplementation on orbital tools, J VAC SCI B, 17(5), 1999, pp. 2262-2271