Authors:
Torres, JL
Nounu, HN
Wasson, JR
Wolfe, JC
Lutz, J
Haugeneder, E
Loschner, H
Stengl, G
Kaesmaier, R
Citation: Jl. Torres et al., Experimental evaluation of an optimized radiation cooling geometry for ionprojection lithography masks, J VAC SCI B, 18(6), 2000, pp. 3207-3209
Authors:
Dauksher, WJ
Resnick, DJ
Clemens, SB
Standfast, DL
Masnyj, ZS
Wasson, JR
Bergmann, NM
Han, SI
Mangat, PJS
Citation: Wj. Dauksher et al., TaSiN thin-film pattern transfer optimization for 200 mm SCALPEL and extreme ultraviolet lithography masks, J VAC SCI B, 18(6), 2000, pp. 3232-3236