Authors:
Wells, OC
McGlashan-Powell, M
Vladar, AE
Postek, MT
Citation: Oc. Wells et al., Application of the low-loss scanning electron microscope image to integrated circuit technology - Part II - Chemically-mechanically planarized samples, SCANNING, 23(6), 2001, pp. 366-371
Citation: Mt. Postek et al., Application of the low-loss scanning electron microscope image to integrated circuit technology part 1 - Applications to accurate dimension measurements, SCANNING, 23(5), 2001, pp. 298-304
Citation: Oc. Wells, Comparison of different models for the generation of electron backscattering patterns in the scanning electron microscope, SCANNING, 21(6), 1999, pp. 368-371
Citation: Oc. Wells et Mt. Postek, Detector strategy for the scanning electron microscope inspection and metrology of semiconductor wafers, SCANNING, 21(2), 1999, pp. 145-146