Authors: Ulrich, S Kratzsch, A Leiste, H Stuber, M Schlossmacher, P Holleck, H Binder, J Schild, D Westermeyer, S Becker, P Oechsner, H

Citation: S. Ulrich et al., Variation of carbon concentration, ion energy, and ion current density of magnetron-sputtered boron carbonitride films, SURF COAT, 119, 1999, pp. 742-750