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Results: 1-3 |
Results: 3
In-plane tip deflection and force achieved with asymmetrical polysilicon electrothermal microactuators
Authors: Kolesar, ES Ko, SY Howard, JT Allen, PB Wilken, JM Boydston, NC Ruff, MD Wilks, RJ
Citation: Es. Kolesar et al., In-plane tip deflection and force achieved with asymmetrical polysilicon electrothermal microactuators, THIN SOL FI, 377, 2000, pp. 719-726
Thermally actuated microbeam for large in-plane mechanical deflections
Authors: Kolesar, ES Allen, PB Howard, JT Wilken, JM Boydston, NC
Citation: Es. Kolesar et al., Thermally actuated microbeam for large in-plane mechanical deflections, J VAC SCI A, 17(4), 1999, pp. 2257-2263
Thermally-actuated cantilever beam for achieving large in-plane mechanicaldeflections
Authors: Kolesar, ES Allen, PB Howard, JT Wilken, JM Boydston, N
Citation: Es. Kolesar et al., Thermally-actuated cantilever beam for achieving large in-plane mechanicaldeflections, THIN SOL FI, 356, 1999, pp. 295-302
Risultati: 1-3 |