Citation: Rh. Livengood et al., Application of advanced micromachining techniques for the characterizationand debug of high performance microprocessors, J VAC SCI B, 17(1), 1999, pp. 40-43
Authors:
Paniccia, M
Eiles, T
Livengood, R
Rao, VRM
Winer, P
Yee, WM
Citation: M. Paniccia et al., Novel optical probing and micromachining techniques for silicon debug of flip chip packaged microprocessors, MICROEL ENG, 46(1-4), 1999, pp. 27-34