Authors:
McIntosh, AL
Wofford, BA
Lucchese, RR
Bevan, JW
Citation: Al. Mcintosh et al., High resolution Fourier transform infrared spectroscopy using a high temperature argon arc source, INFR PHYS T, 42(6), 2001, pp. 509-514
Authors:
Wofford, BA
Jackson, MW
Hartz, C
Bevan, JW
Citation: Ba. Wofford et al., Surface wave plasma abatement of CHF3 and CF4 containing semiconductor process emissions, ENV SCI TEC, 33(11), 1999, pp. 1892-1897