Authors:
Wohner, T
Cimalla, V
Stauden, T
Schaefer, JA
Pezoldt, J
Citation: T. Wohner et al., Real time spectroscopic ellipsometry monitoring of the SiC growth during the interaction process of elemental carbon with Si surfaces, THIN SOL FI, 364(1-2), 2000, pp. 28-32