Authors: Cheng, Z Peng, HR Xie, GW Shi, YL

Citation: Z. Cheng et al., Annealing studies of TiN films deposited by plasma-assisted CVD, SURF COAT, 138(2-3), 2001, pp. 237-241

Authors: Shi, YL Peng, HR Xie, Y Xie, GW Zhao, C Li, SZ

Citation: Yl. Shi et al., Plasma CVD of hard coatings Ti(CNO) using metallo-organic compound Ti(OC3H7)(4), SURF COAT, 132(1), 2000, pp. 26-30