Authors:
Akiyama, M
Xu, C
Nonaka, K
Hagio, T
Nishimura, S
Shobu, K
Watanabe, T
Citation: M. Akiyama et al., Influence of sputtering atmosphere on crystallinity and crystal orientation of AlN thin films deposited on polycrystalline MoSi2 substrates, J MATER SCI, 33(9), 1998, pp. 2463-2467