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Results: 2
VERTICAL PROFILE CONTROL IN ULTRAHIGH-ASPECT-RATIO CONTACT HOLE ETCHING WITH 0.05-MU-M-DIAMETER RANGE
Authors:
IKEGAMI N YABATA A LIU GL UCHIDA H HIRASHITA N KANAMORI J
Citation:
N. Ikegami et al., VERTICAL PROFILE CONTROL IN ULTRAHIGH-ASPECT-RATIO CONTACT HOLE ETCHING WITH 0.05-MU-M-DIAMETER RANGE, JPN J A P 1, 37(4B), 1998, pp. 2337-2342
CHARACTERISTICS OF VERY HIGH-ASPECT-RATIO CONTACT HOLE ETCHING
Authors:
IKEGAMI N YABATA A MATSUI T KANAMORI J HORIIKE Y
Citation:
N. Ikegami et al., CHARACTERISTICS OF VERY HIGH-ASPECT-RATIO CONTACT HOLE ETCHING, JPN J A P 1, 36(4B), 1997, pp. 2470-2476
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