Authors: IKEGAMI N YABATA A LIU GL UCHIDA H HIRASHITA N KANAMORI J

Citation: N. Ikegami et al., VERTICAL PROFILE CONTROL IN ULTRAHIGH-ASPECT-RATIO CONTACT HOLE ETCHING WITH 0.05-MU-M-DIAMETER RANGE, JPN J A P 1, 37(4B), 1998, pp. 2337-2342

Authors: IKEGAMI N YABATA A MATSUI T KANAMORI J HORIIKE Y

Citation: N. Ikegami et al., CHARACTERISTICS OF VERY HIGH-ASPECT-RATIO CONTACT HOLE ETCHING, JPN J A P 1, 36(4B), 1997, pp. 2470-2476