Authors: HOUMMADY M FARNAULT E YAHIRO T KAWAKATSU H

Citation: M. Hoummady et al., SIMULTANEOUS OPTICAL-DETECTION TECHNIQUES, INTERFEROMETRY, AND OPTICAL BEAM DEFLECTION FOR DYNAMIC-MODE CONTROL OF SCANNING FORCE MICROSCOPY, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 15(4), 1997, pp. 1539-1542