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Results: 1-7 |
Results: 7
FIELD OXIDE THINNING BEHAVIOR IN LOCAL OXIDATION OF SILICON PROCESS UNDER ENHANCED OXIDATION CONDITIONS
Authors: JANG SA YEO IS KIM YB
Citation: Sa. Jang et al., FIELD OXIDE THINNING BEHAVIOR IN LOCAL OXIDATION OF SILICON PROCESS UNDER ENHANCED OXIDATION CONDITIONS, Journal of the Electrochemical Society, 145(5), 1998, pp. 1664-1667
LINEWIDTH DEPENDENCE OF STRESS-RELAXATION AND MICROSTRUCTURAL CHANGE IN PASSIVATED AL(CU) LINES
Authors: YEO IS HO PS ANDERSON SGH KAWASAKI H
Citation: Is. Yeo et al., LINEWIDTH DEPENDENCE OF STRESS-RELAXATION AND MICROSTRUCTURAL CHANGE IN PASSIVATED AL(CU) LINES, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 15(4), 1997, pp. 908-915
IN-SITU TRANSMISSION ELECTRON-MICROSCOPY STUDY OF PLASTIC-DEFORMATIONAND STRESS-INDUCED VOIDING IN AL-CU INTERCONNECTS
Authors: JAWARANI D KAWASAKI H YEO IS RABENBERG L STARK JP HO PS
Citation: D. Jawarani et al., IN-SITU TRANSMISSION ELECTRON-MICROSCOPY STUDY OF PLASTIC-DEFORMATIONAND STRESS-INDUCED VOIDING IN AL-CU INTERCONNECTS, Journal of applied physics, 82(4), 1997, pp. 1563-1577
IN-SITU TRANSMISSION ELECTRON-MICROSCOPY STUDY OF PLASTIC-DEFORMATIONIN PASSIVATED AL-CU THIN-FILMS
Authors: JAWARANI D KAWASAKI H YEO IS RABENBERG L STARK JP HO PS
Citation: D. Jawarani et al., IN-SITU TRANSMISSION ELECTRON-MICROSCOPY STUDY OF PLASTIC-DEFORMATIONIN PASSIVATED AL-CU THIN-FILMS, Journal of applied physics, 82(1), 1997, pp. 171-181
EFFECTS OF OXIDE OVERLAYER ON THERMAL-STRESS AND YIELD BEHAVIOR OF AL-ALLOY FILMS
Authors: YEO IS ANDERSON SGH JAWARANI D HO PS CLARKE AP SAIMOTO S RAMASWAMI S CHEUNG R
Citation: Is. Yeo et al., EFFECTS OF OXIDE OVERLAYER ON THERMAL-STRESS AND YIELD BEHAVIOR OF AL-ALLOY FILMS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(4), 1996, pp. 2636-2644
CHARACTERISTICS OF THERMAL-STRESSES IN AL(CU) FINE LINES .1. UNPASSIVATED LINE STRUCTURES
Authors: YEO IS HO PS ANDERSON SGH
Citation: Is. Yeo et al., CHARACTERISTICS OF THERMAL-STRESSES IN AL(CU) FINE LINES .1. UNPASSIVATED LINE STRUCTURES, Journal of applied physics, 78(2), 1995, pp. 945-952
CHARACTERISTICS OF THERMAL-STRESSES IN AL(CU) FINE LINES .2. PASSIVATED LINE STRUCTURES
Authors: YEO IS ANDERSON SGH HO PS HU CK
Citation: Is. Yeo et al., CHARACTERISTICS OF THERMAL-STRESSES IN AL(CU) FINE LINES .2. PASSIVATED LINE STRUCTURES, Journal of applied physics, 78(2), 1995, pp. 953-961
Risultati: 1-7 |