Authors: XIA LQ YIEH E GEE P CAMPANA F NGUYEN BC

Citation: Lq. Xia et al., PROCESS CHARACTERISTICS FOR SUBATMOSPHERIC CHEMICAL-VAPOR-DEPOSITED BOROPHOSPHOSILICATE GLASS AND EFFECT OF CARRIER GAS, Journal of the Electrochemical Society, 144(9), 1997, pp. 3208-3212

Authors: XIA LQ YIEH E VENKATARAMAN S NGUYEN BC

Citation: Lq. Xia et al., SUBATMOSPHERIC CHEMICAL-VAPOR-DEPOSITED BORON-DOPED SILICATE GLASS-FILMS FOR SOLID-PHASE DIFFUSION APPLICATIONS, Journal of the Electrochemical Society, 144(5), 1997, pp. 117-119

Authors: IYER R THAKUR RPS RHODES H LIAO R ROSLER R YIEH E

Citation: R. Iyer et al., ELECTRICAL AND PHYSICAL CHARACTERIZATION OF TETRAETHYLORTHOSILICATE-O-3 BOROPHOSPHOSILICATE GLASS, Journal of the Electrochemical Society, 143(10), 1996, pp. 3366-3371

Authors: ROBLES S YIEH E NGUYEN BC

Citation: S. Robles et al., MOISTURE RESISTANCE OF PLASMA-ENHANCED CHEMICAL-VAPOR-DEPOSITED OXIDES USED FOR ULTRALARGE SCALE INTEGRATED DEVICE APPLICATIONS, Journal of the Electrochemical Society, 142(2), 1995, pp. 580-585

Authors: KWOK K YIEH E ROBLES S NGUYEN BC

Citation: K. Kwok et al., SURFACE RELATED PHENOMENA IN INTEGRATED PECVD OZONE TEOS SACVD PROCESSES FOR SUBHALF MICRON GAP FILL - ELECTROSTATIC EFFECTS, Journal of the Electrochemical Society, 141(8), 1994, pp. 2172-2177