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CHARACTERIZATION OF Y2O3-STABILIZED ZRO2 THIN-FILMS BY PLASMA-ENHANCED METALLOORGANIC CHEMICAL-VAPOR-DEPOSITION
Authors: KIM ET LEE JW LEE SH YOON SG
Citation: Et. Kim et al., CHARACTERIZATION OF Y2O3-STABILIZED ZRO2 THIN-FILMS BY PLASMA-ENHANCED METALLOORGANIC CHEMICAL-VAPOR-DEPOSITION, Journal of the Electrochemical Society, 140(9), 1993, pp. 2625-2629
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