Authors: JOHNSON KS THYWISSEN JH DEKKER NH BERGGREN KK CHU AP YOUNKIN R PRENTISS M

Citation: Ks. Johnson et al., LOCALIZATION OF METASTABLE ATOM BEAMS WITH OPTICAL STANDING WAVES - NANOLITHOGRAPHY AT THE HEISENBERG LIMIT, Science, 280(5369), 1998, pp. 1583-1586

Authors: THYWISSEN JH JOHNSON KS YOUNKIN R DEKKER NH BERGGREN KK CHU AP PRENTISS M LEE SA

Citation: Jh. Thywissen et al., NANOFABRICATION USING NEUTRAL ATOMIC-BEAMS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 15(6), 1997, pp. 2093-2100

Authors: BERGGREN KK YOUNKIN R CHEUNG E PRENTISS M BLACK AJ WHITESIDES GM RALPH DC BLACK CT TINKHAM M

Citation: Kk. Berggren et al., DEMONSTRATION OF A NANOLITHOGRAPHIC TECHNIQUE USING A SELF-ASSEMBLED MONOLAYER RESIST FOR NEUTRAL ATOMIC CESIUM, Advanced materials, 9(1), 1997, pp. 52

Authors: YOUNKIN R BERGGREN KK JOHNSON KS PRENTISS M RALPH DC WHITESIDES GM

Citation: R. Younkin et al., NANOSTRUCTURE FABRICATION IN SILICON USING CESIUM TO PATTERN A SELF-ASSEMBLED MONOLAYER, Applied physics letters, 71(9), 1997, pp. 1261-1263

Authors: JOHNSON KS BERGGREN KK BLACK A BLACK CT CHU AP DEKKER NH RALPH DC THYWISSEN JH YOUNKIN R TINKHAM M PRENTISS M WHITESIDES GM

Citation: Ks. Johnson et al., USING NEUTRAL METASTABLE ARGON ATOMS AND CONTAMINATION LITHOGRAPHY TOFORM NANOSTRUCTURES IN SILICON, SILICON DIOXIDE, AND GOLD, Applied physics letters, 69(18), 1996, pp. 2773-2775