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Results: 2
Analysis and modeling of low pressure CVD of silicon nitride from a silane-ammonia mixture - I. Experimental study and determination of a gaseous phase mechanism
Authors: Yacoubi, K Azzaro-Pantel, C Scheid, E Couderc, JP
Citation: K. Yacoubi et al., Analysis and modeling of low pressure CVD of silicon nitride from a silane-ammonia mixture - I. Experimental study and determination of a gaseous phase mechanism, J ELCHEM SO, 146(8), 1999, pp. 3009-3017
Analysis and modeling of low pressure CVD of silicon nitride from a silane-ammonia mixture - II. Deposition modeling
Authors: Yacoubi, K Azzaro-Pantel, C Couderc, JP
Citation: K. Yacoubi et al., Analysis and modeling of low pressure CVD of silicon nitride from a silane-ammonia mixture - II. Deposition modeling, J ELCHEM SO, 146(8), 1999, pp. 3018-3027
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