Authors:
Yakshin, AE
Louis, E
Gorts, PC
Maas, ELG
Bijkerk, F
Citation: Ae. Yakshin et al., Determination of the layered structure in Mo/Si multilayers by grazing incidence X-ray reflectometry, PHYSICA B, 283(1-3), 2000, pp. 143-148
Authors:
Stuik, R
Louis, E
Yakshin, AE
Gorts, PC
Maas, ELG
Bijkerk, F
Schmitz, D
Scholze, F
Ulm, G
Haidl, M
Citation: R. Stuik et al., Peak and Integrated reflectivity, wavelength and gamma optimization of Mo/Si, and Mo/Be multilayer, multielement optics for extreme ultraviolet lithography, J VAC SCI B, 17(6), 1999, pp. 2998-3002