Authors: Yamamuka, M Kawahara, T Tarutani, M Horikawa, T Shibano, T Oomori, T

Citation: M. Yamamuka et al., Measurement of atomic incorporation rates and modeling of surface reactions in (Ba, Sr)TiO3 films prepared by a liquid source chemical vapor deposition, JPN J A P 1, 40(5A), 2001, pp. 3435-3441

Authors: Kawahara, T Matsuno, S Yamamuka, M Tarutani, M Sato, T Horikawa, T Uchikawa, F Ono, K

Citation: T. Kawahara et al., Conformal step coverage of (Ba,Sr)TiO3 films prepared by liquid source CVDusing Ti(t-BuO)(2)(DPM)(2), JPN J A P 1, 38(4B), 1999, pp. 2205-2209

Authors: Yamamuka, M Kawahara, T Tarutani, M Horikawa, T Oomori, T Ono, K

Citation: M. Yamamuka et al., Modeling of gas-phase and surface reactions in liquid-source chemical-vapor deposition of (Ba,Sr)TiO3 films, J APPL PHYS, 86(2), 1999, pp. 1082-1089