Authors: Chen, QF Yao, DJ Kim, CJ Carman, GP

Citation: Qf. Chen et al., Investigating the influence of fabrication process and crystal orientationon shear strength of silicon microcomponents, J MATER SCI, 35(21), 2000, pp. 5465-5474

Authors: Chen, QF Yao, DJ Kim, CJ Carman, GP

Citation: Qf. Chen et al., Mesoscale actuator device: micro interlocking mechanism to transfer macro load, SENS ACTU-A, 73(1-2), 1999, pp. 30-36

Authors: Chen, QF Yao, DJ Kim, CJ Carman, GP

Citation: Qf. Chen et al., Development of mesoscale actuator device with microinterlocking mechanism, J IN MAT SY, 9(6), 1998, pp. 449-457