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Citation: Av. Hayes et al., Ion source for ion beam deposition employing a novel electrode assembly, REV SCI INS, 71(2), 2000, pp. 1163-1167

Authors: Hegde, H Wang, JS Devasahayam, AJ Kanarov, V Hayes, A Yevtukhov, R Bozeman, S Anderson, P Tabat, N Ryan, P

Citation: H. Hegde et al., Ion beam deposition of permanent magnet layers for liftoff processes, J VAC SCI B, 17(5), 1999, pp. 2186-2190