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Results: 1
Near-field optical photomask repair with a femtosecond laser
Authors:
Lieberman, K Shani, Y Melnik, I Yoffe, S Sharon, Y
Citation:
K. Lieberman et al., Near-field optical photomask repair with a femtosecond laser, J MICROSC O, 194, 1999, pp. 537-541
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