Authors:
Toyota, H
Takahara, K
Okano, M
Yotsuya, T
Kikuta, H
Citation: H. Toyota et al., Fabrication of microcone array for antireflection structured surface usingmetal dotted pattern, JPN J A P 2, 40(7B), 2001, pp. L747-L749
Authors:
Hirai, Y
Kikuta, H
Okano, M
Yotsuya, T
Yamamoto, K
Citation: Y. Hirai et al., Automatic dose optimization system for resist cross-sectional profile in aelectron beam lithography, JPN J A P 1, 39(12B), 2000, pp. 6831-6835
Authors:
Yu, WJ
Takahara, K
Konishi, T
Yotsuya, T
Ichioka, Y
Citation: Wj. Yu et al., Fabrication of multilevel phase computer-generated hologram elements basedon effective medium theory, APPL OPTICS, 39(20), 2000, pp. 3531-3536