Authors: Kim, JH Kim, EJ Choi, HC Kim, CW Cho, JH Lee, YW You, BG Yi, SY Lee, HJ Han, K Jang, WH Rhee, TH Lee, JW Pearton, SJ

Citation: Jh. Kim et al., Evaluation of fluorinated polyimide etching processes for optical waveguide fabrication, THIN SOL FI, 341(1-2), 1999, pp. 192-195