Authors:
Kim, JH
Kim, EJ
Choi, HC
Kim, CW
Cho, JH
Lee, YW
You, BG
Yi, SY
Lee, HJ
Han, K
Jang, WH
Rhee, TH
Lee, JW
Pearton, SJ
Citation: Jh. Kim et al., Evaluation of fluorinated polyimide etching processes for optical waveguide fabrication, THIN SOL FI, 341(1-2), 1999, pp. 192-195