Authors: REJ DJ DAVIS HA OLSON JC REMNEV GE ZAKOUTAEV AN RYZHKOV VA STRUTS VK ISAKOV IF SHULOV VA NOCHEVNAYA NA STINNETT RW NEAU EL YATSUI K JIANG W

Citation: Dj. Rej et al., MATERIALS PROCESSING WITH INTENSE PULSED ION-BEAMS, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 15(3), 1997, pp. 1089-1097