Authors:
OTANORIVERA W
PILIONE LJ
ZAPIEN JA
MESSIER R
Citation: W. Otanorivera et al., CUBIC BORON-NITRIDE THIN-FILM DEPOSITION BY UNBALANCED MAGNETRON SPUTTERING AND DC PULSED SUBSTRATE BIASING, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 16(3), 1998, pp. 1331-1335
Citation: S. Muhl et al., ALUMINUM NITRIDE FILMS PREPARED BY REACTIVE MAGNETRON SPUTTERING, Journal of physics. D, Applied physics, 30(15), 1997, pp. 2147-2155