Authors: BOULTADAKIS S LOGOTHETIDIS S PAPADOPOULOS A VOUROUTZIS N ZORBA P GIRGINOUDI D THANAILAKIS A

Citation: S. Boultadakis et al., SPECTROSCOPIC ELLIPSOMETRY STUDIES OF VERY THIN THERMALLY GROWN SIO2-FILMS - INFLUENCE OF OXIDATION PROCEDURE ON OXIDE QUALITY AND STRESS, Journal of applied physics, 78(6), 1995, pp. 4164-4173