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Authors: YING M ZOU QB YI S

Citation: M. Ying et al., FINITE-ELEMENT ANALYSIS OF SILICON CONDENSER MICROPHONES WITH CORRUGATED DIAPHRAGMS, Finite elements in analysis and design, 30(1-2), 1998, pp. 163-173

Authors: ZOU QB WANG ZF LIN RM YI S GONG HQ LIM MK LI ZJ LIU LT

Citation: Qb. Zou et al., A STUDY ON CORRUGATED DIAPHRAGMS FOR HIGH-SENSITIVITY STRUCTURES, Journal of micromechanics and microengineering, 7(4), 1997, pp. 310-315

Authors: ZOU QB LI ZJ LIU LT

Citation: Qb. Zou et al., THEORETICAL AND EXPERIMENTAL STUDIES OF SINGLE-CHIP-PROCESSED MINIATURE SILICON CONDENSER MICROPHONE WITH CORRUGATED DIAPHRAGM, Sensors and actuators. A, Physical, 63(3), 1997, pp. 209-215

Authors: ZOU QB LI ZJ LIU LT

Citation: Qb. Zou et al., DESIGN AND FABRICATION OF SILICON CONDENSER MICROPHONE USING CORRUGATED DIAPHRAGM TECHNIQUE, Journal of microelectromechanical systems, 5(3), 1996, pp. 197-204

Authors: ZOU QB LI ZJ LIU LT

Citation: Qb. Zou et al., NEW METHODS FOR MEASURING MECHANICAL-PROPERTIES OF THIN-FILMS IN MICROMACHINING - BEAM PULL-IN VOLTAGE (V-PI) METHOD AND LONG BEAM DEFLECTION (LBD) METHOD, Sensors and actuators. A, Physical, 48(2), 1995, pp. 137-143