Authors:
Zambov, LM
Ivanov, B
Popov, C
Georgiev, G
Stoyanov, I
Dimitrov, DB
Citation: Lm. Zambov et al., Characterization of low-dielectric constant SiOCN films synthesized by lowpressure chemical vapour deposition, J PHYS IV, 11(PR3), 2001, pp. 1005-1012
Authors:
Plass, MF
Popov, C
Ivanov, B
Mandl, S
Jelinek, H
Zambov, LM
Kulisch, W
Citation: Mf. Plass et al., Correlation between photoluminescence, optical and structural properties of amorphous nitrogen-rich carbon nitride films, APPL PHYS A, 72(1), 2001, pp. 21-27
Citation: C. Popov et al., Optical, electrical and mechanical properties of nitrogen-rich carbon nitride films deposited by inductively coupled plasma chemical vapor deposition, THIN SOL FI, 377, 2000, pp. 156-162